Proceedings of SPIE 58781D 1-8 (2005)
Yoshikazu Kanai a, b, Yousuke Kanzaki a, Moriaki Wakaki a, N. Takeyama b
a) Course of Optics and Photonics, Dep. Applied Science, Tokai University
b) Genesia Corporation
A high resolution Confocal Laser Scanning Microscope (CLSM) with UV / VIS light sources was developed as the first step of multi-functional microscope. The optical system is designed to optimize for both UV and VIS wavelengths. An UV laser is used to achieve higher resolution, and a VIS is for multi functions. A new objective lens specialized for this application was designed and fabricated. Specification of the lens and the optical system is NA:0.95, EFL:2.5mm, WD:1.5mm, Resolution:160nm and achromatic for two wavelengths of UV 325.0nm / VIS 632.8nm. Several specimens were characterized to check the performance of the system. Some optical materials under study were measured for evaluation, and interesting results could be obtained. Multi-functional measurements are being planed as a next step. This system will help the research of nano-structures, photonic-crystals and biology.